Hybrid electrostatic actuation system comprises sacrificial isolation layer sandwiched between metal-dielectric-metal structure and substrate, where sacrificial isolation layer is etched and released to define air gap extending between metal-dielectric-metal structure and substrate
	VERMA S K; MITRA B
	2023-07-28
专利权人	INDIAN INST TECHNOLOGY DELHI (IITD-C)
申请日期	2023-07-28
专利号	IN202311051056-A
成果简介	NOVELTY - Hybrid electrostatic actuation system (100) comprises an internal dielectric bi-directional actuator (102) comprising a metal-dielectric-metal (MIMIM) structure (110) comprising: a first metal layer (120); a first dielectric layer (126) sandwiched between the first metal layer and a second metal layer (132); and a second dielectric layer (140) sandwiched between the second metal layer and a third metal layer (146); a sacrificial isolation layer (104) sandwiched between the MIMIM structure and a substrate, where the sacrificial isolation layer is etched and released to define an air gap (152) extending between the MIMIM structure and the substrate (106). The substrate is adapted to support the MIMIM structure, and a back contact disposed parallel to the MIMIM structure; and an airgap actuator collectively defined by the first metal layer, the air gap, and the substrate. USE - Hybrid electrostatic actuation system. ADVANTAGE - The system is adapted to actuate bidirectionally with a very small actuation voltage. An airgap actuator combined with an internal dielectric bi-directional actuator, has a much lower pull-in voltage and may be used in radio frequency switches where a large gap is desirable to increase the figure of merit. The direction of actuation of the system is opposite to that of an airgap transducer, so, the two can be utilized to provide bidirectional actuation. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing a hybrid electrostatic actuation system. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a hybrid electrostatic actuation system. 100Hybrid electrostatic actuation system 102Internal dielectric bi-directional actuator 104Sacrificial isolation layer 110Metal-dielectric-metal structure 120First metal layer 126First dielectric layer 132Second metal layer 140Second dielectric layer 146Third metal layer 152Air gap
IPC 分类号	H01L-021/764 ; H01L-021/768 ; H01L-023/00 ; H01L-023/532 ; H01L-029/49
国家	印度
专业领域	材料科学
语种	英语
成果类型	专利
文献类型	科技成果
条目标识符	http://119.78.100.226:8889/handle/3KE4DYBR/21061
专题	中国科学院新疆生态与地理研究所
作者单位	INDIAN INST TECHNOLOGY DELHI (IITD-C)
推荐引用方式 GB/T 7714	VERMA S K,MITRA B. Hybrid electrostatic actuation system comprises sacrificial isolation layer sandwiched between metal-dielectric-metal structure and substrate, where sacrificial isolation layer is etched and released to define air gap extending between metal-dielectric-metal structure and substrate. IN202311051056-A[P]. 2023.

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