| Method of deposition of thin film of solid electrolyte lipon film on the surface of steel substrates | |
| 2023-12-22 | |
| 专利权人 | FEDERAL STATE BUDGETARY INST (FSBI-C) |
| 申请日期 | 2023-12-22 |
| 专利号 | RU2831464-C1 |
| 成果简介 | NOVELTY - Invention relates to a method for vacuum ion-plasma deposition of a thin amorphous lithium phosphorus oxynitride (LiPON) film on the surface of steel substrates. Substrates are cleaned by ion sputtering, heating the crucible with lithium orthophosphate (Li3PO4) and evaporation of lithium orthophosphate (Li3PO4). Said heating of the crucible and evaporation of lithium orthophosphate is carried out using a combination of the main discharge in a mixture of nitrogen and lithium orthophosphate vapours (Li3PO4), formed between a hollow self-heated cathode placed in a vacuum chamber, through which nitrogen is supplied, and a crucible, and an auxiliary discharge formed between a directly heated thermionic cathode and a crucible placed in the vacuum chamber. Plasma of auxiliary discharge is separated from flow of lithium orthophosphate by screen. Ratio of currents of the main and auxiliary discharges is set in range of 0.7-1. Flap is opened. Thin amorphous film of lithium phosphorus oxynitride (LiPON) with ionic conductivity of more than 1.2⋅10-6 (Ohm⋅cm)-1 is deposited at a constant rate at a nitrogen pressure of 1 Pa and a temperature of not more than 300 °C on the surface of steel substrates. USE - Chemistry; spraying. ADVANTAGE - Obtaining thin films of phosphorus-oxynitride of lithium with evaporation of lithium orthophosphate under conditions of controlled degree of dissociation of vapours, which determines ionic conductivity of films. 1 cl, 3 dwg |
| IPC 分类号 | C23C-014/16 ; C23C-014/24 |
| 国家 | 俄罗斯 |
| 专业领域 | 材料科学 |
| 语种 | 英语 |
| 成果类型 | 专利 |
| 文献类型 | 科技成果 |
| 条目标识符 | http://119.78.100.226:8889/handle/3KE4DYBR/18782 |
| 专题 | 中国科学院新疆生态与地理研究所 |
| 作者单位 | FEDERAL STATE BUDGETARY INST (FSBI-C) |
| 推荐引用方式 GB/T 7714 | GAVRILOV N V,KAMENSKIKH A S,TRETNIKOV P V,et al. Method of deposition of thin film of solid electrolyte lipon film on the surface of steel substrates. RU2831464-C1[P]. 2023. |
| 条目包含的文件 | 条目无相关文件。 | |||||
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论