Power transistor based on aln/gan heterostructure with 2d electron gas comprises substrate
2023-12-28
专利权人UNIV MISIS NAT SCI & TECHNOLOGY (UMNS-C)
申请日期2023-12-28
专利号RU2823223-C1
成果简介NOVELTY - Invention relates to solid-state electronics devices, and in particular to the design of a power transistor based on compounds of group III nitrides. Power transistor based on AlN/GaN heterostructure with 2D electron gas consists of a substrate, a GaN buffer layer deposited on the substrate, ultrathin barrier layer AlN ultrathin not more than 7, applied on buffer layer, protective upper layer of GaN, applied on barrier layer, source electrodes, gate and drain, applied on protective layer and spatially separated from each other, passivating layer Si3N4, applied on protective layer between electrodes, as well as metallization of the field plate deposited on the passivating layer and electrically connected to the gate, wherein the distance between the gate and the drain, as well as the length of the field plate – interrelated values selected based on the required value of breakdown voltage. USE - Electricity. ADVANTAGE - Invention enables to obtain a power transistor based on a III-nitride heterostructure, characterized by a layer resistance of less than 250 Ohm/□, with a topology providing breakdown voltage of more than 100 V. 1 cl, 4 dwg
IPC 分类号H01L-029/76 ; H01L-029/768 ; H01L-029/772
国家俄罗斯
专业领域材料科学
语种英语
成果类型专利
文献类型科技成果
条目标识符http://119.78.100.226:8889/handle/3KE4DYBR/18622
专题中国科学院新疆生态与地理研究所
作者单位
UNIV MISIS NAT SCI & TECHNOLOGY (UMNS-C)
推荐引用方式
GB/T 7714
RYZHUK R V,GUSEV A S,KARGIN N I,et al. Power transistor based on aln/gan heterostructure with 2d electron gas comprises substrate. RU2823223-C1[P]. 2023.
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