Device used to deposit zirconium nitride, which is horizontal quartz reactor equipped with pipes for supplying gases and removing reaction products, high-frequency heater, in reactor boat with zirconium chloride and workpiece are installed
	BALDAEV L KH; GONCHAROV O YU; FAYZULLIN R R
	2024-03-04
专利权人	PROTECTIVE COATINGS SCI PRODUCTIVE ASSOC (PROT-Non-standard)
申请日期	2024-03-04
专利号	RU230878-U1
成果简介	NOVELTY - Device, which is a horizontal quartz reactor equipped with pipes for supplying gases and removing reaction products, as well as a high-frequency heater, in the reactor a boat (7) with zirconium chloride and a workpiece are installed, where the reactor is divided by two partitions with openings into three areas i.e. reagent preparation, reaction and waste evacuation, where the reagent preparation area (1) there is a resistive heater (8), tubes for supplying nitrogen and hydrogen, a boat with zirconium chloride and a thermocouple for monitoring the heating temperature of the boat, in the reaction area (2) there is a workpiece installed in a holder, a high-frequency heater, a thermocouple for monitoring the heating temperature, and in the waste evacuation area (3) there is a tube for removing reaction products. USE - The device is useful for depositing zirconium nitride. ADVANTAGE - None given. DESCRIPTION OF DRAWING(S) - The figure shows the diagram of the reactor. 1Reagent preparation area 2Reaction area 3Waste evacuation area 7Boat 8Resistive heater
IPC 分类号	C01B-021/076 ; C30B-029/38
国家	俄罗斯
专业领域	材料科学
语种	英语
成果类型	专利
文献类型	科技成果
条目标识符	http://119.78.100.226:8889/handle/3KE4DYBR/17898
专题	中国科学院新疆生态与地理研究所
作者单位	PROTECTIVE COATINGS SCI PRODUCTIVE ASSOC (PROT-Non-standard)
推荐引用方式 GB/T 7714	BALDAEV L KH,GONCHAROV O YU,FAYZULLIN R R. Device used to deposit zirconium nitride, which is horizontal quartz reactor equipped with pipes for supplying gases and removing reaction products, high-frequency heater, in reactor boat with zirconium chloride and workpiece are installed. RU230878-U1[P]. 2024.

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