| INSTALLATION FOR MAGNETRON SPUTTERING OF COATINGS ON MOVING THIN METAL WIRE OR OPTICAL FIBRE | |
| 2024-04-15 | |
| 专利权人 | FEDERAL STATE BUDGETARY INST (FSBI-C) |
| 申请日期 | 2024-04-15 |
| 专利号 | RU2829751-C1 |
| 成果简介 | NOVELTY - Invention relates to an apparatus for magnetron sputtering of a coating on an extended flexible article in the form of a metal wire or optical fibre. Above installation includes a vacuum system, a system for rewinding a metal wire or optical fibre and a magnetron sputtering system. Said magnetron sputtering system comprises a cylindrical water-cooled cathode, anodes and a solenoid. Said anodes and cylindrical cathode are located with gaps for supply of working gas. Wire or optical fibre rewinding system comprises a feed coil installed in a vacuum chamber of said vacuum system on an axis with an asynchronous coupling, rollers, a receiving coil and a spreader, which are made with possibility of drawing metal wire or optical fibre while providing a constant difference in rotation speeds of the receiving coil and the drive of the asynchronous coupling. Spreader is a roller fixed on the manipulator and made with possibility of reciprocating movements to ensure uniform and layer-by-layer filling of the receiving coil during its rotation. USE - Magnetron sputtering of coating. ADVANTAGE - Possibility of applying thin coatings of uniform thickness from different metals with high efficiency without overheating of metal wire or optical fibre. 1 cl, 3 dwg |
| IPC 分类号 | C23C-014/35 ; C23C-014/56 |
| 国家 | 俄罗斯 |
| 专业领域 | 材料科学 |
| 语种 | 英语 |
| 成果类型 | 专利 |
| 文献类型 | 科技成果 |
| 条目标识符 | http://119.78.100.226:8889/handle/3KE4DYBR/17184 |
| 专题 | 中国科学院新疆生态与地理研究所 |
| 作者单位 | FEDERAL STATE BUDGETARY INST (FSBI-C) |
| 推荐引用方式 GB/T 7714 | LEMZYAKOV A G,PETROZHITSKY A V,POPOV A S,et al. INSTALLATION FOR MAGNETRON SPUTTERING OF COATINGS ON MOVING THIN METAL WIRE OR OPTICAL FIBRE. RU2829751-C1[P]. 2024. |
| 条目包含的文件 | 条目无相关文件。 | |||||
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论