Device for plasma-chemical treatment of inner cavity of one-parameter surfaces of the second order
	BORISENKO D N; KOLESNIKOV N N; FURSOVA T N
	2024-04-19
专利权人	FEDERAL STATE BUDGETARY INST (FSBI-C)
申请日期	2024-04-19
专利号	RU2832425-C1
成果简介	NOVELTY - Invention relates to spark erosion machining and can be used in production of articles from quartz glass. Device for plasma-chemical treatment of inner cavity of one-parameter surface of the second order of quartz glass articles includes cylindrical electrodes with length equal to or greater than the length of the cavity of the second-order one-parameter surface. Coaxially to electrodes near arc discharge zone there are two solenoids connected in series in high-frequency electric circuit in phase with each other. One of the electrodes has a channel for supplying plasma-forming argon gas to the arc discharge zone. USE - Performing operations. ADVANTAGE - Development of device for plasma-chemical etching of inner cavity of one-parameter surfaces of the second order. 1 cl, 3 dwg
IPC 分类号	C03C-023/00 ; H01J-037/32
国家	俄罗斯
专业领域	材料科学
语种	英语
成果类型	专利
文献类型	科技成果
条目标识符	http://119.78.100.226:8889/handle/3KE4DYBR/17102
专题	中国科学院新疆生态与地理研究所
作者单位	FEDERAL STATE BUDGETARY INST (FSBI-C)
推荐引用方式 GB/T 7714	BORISENKO D N,KOLESNIKOV N N,FURSOVA T N. Device for plasma-chemical treatment of inner cavity of one-parameter surfaces of the second order. RU2832425-C1[P]. 2024.

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