| Magnetron sputtering system comprises an anode, cathode in the form of body of revolution | |
| 2024-05-16 | |
| 专利权人 | FERRY WATT LLC (FERR-Non-standard) ; ELEKTROKHIMPRIBOR PLANT (ELEK-Non-standard) |
| 申请日期 | 2024-05-16 |
| 专利号 | RU2828269-C1 |
| 成果简介 | NOVELTY - Invention relates to a magnetron sputtering system. Said magnetron sputtering system comprises an anode, a cathode in the form of a body of revolution and a magnetic system consisting of a permanent magnet and a magnetic conductor. Side surface of the cathode is made at angle of 0–60° to axis of magnetron sputtering system and contains target material applied on it. On the external end side of the cathode there is a plate which performs the function of an electrostatic and profiling screen. Magnetic conductor and cathode are tightly connected with formation of space between them, in which there is a permanent magnet. Said magnetron spraying system is axially movable by lineal actuator. USE - Electricity; various technological processes. ADVANTAGE - Possibility of application of coatings of high quality and accuracy of gradient thickness on the basis of fusible metals and alloys with low emissive capacity. 6 cl, 3 dwg |
| IPC 分类号 | C23C-014/35 ; C23C-014/56 |
| 国家 | 俄罗斯 |
| 专业领域 | 材料科学 |
| 语种 | 英语 |
| 成果类型 | 专利 |
| 文献类型 | 科技成果 |
| 条目标识符 | http://119.78.100.226:8889/handle/3KE4DYBR/16740 |
| 专题 | 中国科学院新疆生态与地理研究所 |
| 作者单位 | 1.FERRY WATT LLC (FERR-Non-standard) 2.ELEKTROKHIMPRIBOR PLANT (ELEK-Non-standard) |
| 推荐引用方式 GB/T 7714 | SALIKEEV S I,GREKHANKIN A V,ALYMOV V V,et al. Magnetron sputtering system comprises an anode, cathode in the form of body of revolution. RU2828269-C1[P]. 2024. |
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