| Device for obtaining digital image of semiconductor wafers, has torque transmission gears which are fixed on electric motor shaft and on scissor mechanism shaft, and damping mechanism which contains spring elements which are located in corners of plate clamping mechanism table | |
| 2024-06-03 | |
| 专利权人 | INNOVISION LLC (INNO-Non-standard) |
| 申请日期 | 2024-06-03 |
| 专利号 | RU231035-U1 |
| 成果简介 | NOVELTY - The device has a housing (1), the longitudinal movement carriages, torque transmission gears (8), and a high-resolution scanner (10). A mechanism is provided for pressing the wafer to the scanning plane, and includes an electric motor (6) and a damping mechanism which is mounted on a scissor lift. The wafer pressing mechanism, the electric motor, and the damping mechanism are mounted on a scissor lift (7). The torque transmission gears are fixed on the electric motor shaft and on the scissor mechanism shaft, and the damping mechanism contains four spring elements which are located in the corners of the plate clamping mechanism table. USE - Device for obtaining digital image of semiconductor wafers. ADVANTAGE - The small defects on the plates are accurately detected. The image quality is degraded due to glare and flare from backlight sources. The quality of the resulting digital image of microelectronic product crystals on a semiconductor wafer is increased thus reducing the risk of the damage. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic general view of the system for forming a digital image of semiconductor wafers. 1Housing 6Electric motor 7Scissor lift 8Torque transmission gear 10High-resolution scanner |
| IPC 分类号 | G01N-021/88 ; H01L-021/66 ; H04N-023/68 |
| 国家 | 俄罗斯 |
| 专业领域 | 信息技术 |
| 语种 | 英语 |
| 成果类型 | 专利 |
| 文献类型 | 科技成果 |
| 条目标识符 | http://119.78.100.226:8889/handle/3KE4DYBR/16445 |
| 专题 | 中国科学院新疆生态与地理研究所 |
| 作者单位 | INNOVISION LLC (INNO-Non-standard) |
| 推荐引用方式 GB/T 7714 | VASILCHENKO D V,ROMASHENKO M A,PUKHOV D A,et al. Device for obtaining digital image of semiconductor wafers, has torque transmission gears which are fixed on electric motor shaft and on scissor mechanism shaft, and damping mechanism which contains spring elements which are located in corners of plate clamping mechanism table. RU231035-U1[P]. 2024. |
| 条目包含的文件 | 条目无相关文件。 | |||||
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