METHOD OF APPLYING TRANSPARENT ELECTROCONDUCTIVE COATING WITH CONTROLLED DISTRIBUTION OF THICKNESS ON NON-CONDUCTIVE SUBSTRATE
	IGNATOV E A; BOILING V S V; MASHIR YU I; MESHKOV B B
	2024-07-22
专利权人	TECHN GLASS SCI RES INST (TEGL-Non-standard)
申请日期	2024-07-22
专利号	RU2836512-C1
成果简介	NOVELTY - Invention relates to a method of producing a transparent electroconductive coating in form of a coating of zinc oxide ZnO, or zinc oxide with an admixture of aluminium AZO, or indium-tin oxide ITO with a variable thickness gradient along two coordinate axes on a substrate by magnetron sputtering. A substrate made of silicate glass is placed on an electrically insulated frame under a floating potential in a vacuum chamber. Vacuuming is carried out, the substrate is heated to temperature of 200-450 °C, supply of gas mixture to vacuum chamber to create working pressure in it from 1⋅10-2 to 1 Pa and magnetron sputtering of the target onto the substrate to obtain said coating. Said magnetron sputtering is carried out using first a main magnetron in the form of a planar magnetron or a cylindrical magnetron having an electrically insulated anode with a positive potential not exceeding 100 V, and then at least one correcting device in the form of a magnetron to provide a coating thickness gradient applied by a planar or cylindrical magnetron, or in the form of an ion source for local etching of the coating applied by a planar or cylindrical magnetron. USE - Chemistry. ADVANTAGE - Obtaining a thickness gradient over two coordinate axes of a transparent electroconductive material on the surface of the substrate and, as a result, variable over two coordinate axes of specific surface resistance. 1 cl, 12 dwg, 4 ex
IPC 分类号	C23C-014/06 ; C23C-014/35 ; C23C-014/54
国家	俄罗斯
专业领域	材料科学
语种	英语
成果类型	专利
文献类型	科技成果
条目标识符	http://119.78.100.226:8889/handle/3KE4DYBR/15698
专题	中国科学院新疆生态与地理研究所
作者单位	TECHN GLASS SCI RES INST (TEGL-Non-standard)
推荐引用方式 GB/T 7714	IGNATOV E A,BOILING V S V,MASHIR YU I,et al. METHOD OF APPLYING TRANSPARENT ELECTROCONDUCTIVE COATING WITH CONTROLLED DISTRIBUTION OF THICKNESS ON NON-CONDUCTIVE SUBSTRATE. RU2836512-C1[P]. 2024.

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