Synthesis of amorphous zinc oxide layer, involves carrying out magnetron method from zinc oxide-based target, using target containing aluminum in argon environment, and subjecting growth surface of substrate to ion bombardment with krypton ions with addition of hydrogen ions
	ABDUEV M KH M; ABDUEV A H; BELYAEV V V
	2024-10-11
专利权人	UNIV MISIS NAT SCI & TECHNOLOGY (UMNS-C)
申请日期	2024-10-11
专利号	RU2024130664-A
成果简介	NOVELTY - Synthesis of amorphous zinc oxide layer involves carrying out magnetron method from a zinc oxide-based target, using a target containing 6-10 atomic% aluminum in an argon environment under a pressure of 0.1-0.5 Pa simultaneously with magnetron deposition, subjecting the growth surface of the substrate to ion bombardment with krypton ions with the addition of 5-10% hydrogen ions with an energy of 0.8-2 keV and a flux n of 100-1000 m. The m is the value of the flux onto the growth surface of zinc atoms. USE - Synthesis of amorphous zinc oxide layer.
IPC 分类号	C23C-014/35
国家	俄罗斯
专业领域	材料科学
语种	英语
成果类型	专利
文献类型	科技成果
条目标识符	http://119.78.100.226:8889/handle/3KE4DYBR/14897
专题	中国科学院新疆生态与地理研究所
作者单位	UNIV MISIS NAT SCI & TECHNOLOGY (UMNS-C)
推荐引用方式 GB/T 7714	ABDUEV M KH M,ABDUEV A H,BELYAEV V V. Synthesis of amorphous zinc oxide layer, involves carrying out magnetron method from zinc oxide-based target, using target containing aluminum in argon environment, and subjecting growth surface of substrate to ion bombardment with krypton ions with addition of hydrogen ions. RU2024130664-A[P]. 2024.

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