Method for removing material from surface of optical components with wide quasi-parallel ion beam, involves calculating dependence of speed of movement of component on coordinate along long side, and removing material during linear movement of component at variable speed behind slit diaphragm
	PESTOV A E; CHERNYSHEV A K; MIKHAILENKO M S; MALYSHEV I V
	2024-11-21
专利权人	INTEROPTICS LLC (INTE-Non-standard)
申请日期	2024-11-21
专利号	RU2024134916-A
成果简介	NOVELTY - The method involves calculating the speed of movement of the workpiece, and moving the component in accordance with the calculated speed behind the diaphragm forming the ion beam. The formation of cylindrical mirrors operating in sliding geometry is performed. The etching time is calculated at each point along the long side of the component depending on the deviation of the required profile from the flat initial surface. The dependence of the speed of movement of the component on the coordinate along long side is calculated. The material is removed during the linear movement of the component at a variable speed behind the slit diaphragm. USE - Method for removing material from surface of optical components with wide quasi-parallel ion beam.
IPC 分类号	B24B-013/00
国家	俄罗斯
专业领域	信息技术
语种	英语
成果类型	专利
文献类型	科技成果
条目标识符	http://119.78.100.226:8889/handle/3KE4DYBR/14424
专题	中国科学院新疆生态与地理研究所
作者单位	INTEROPTICS LLC (INTE-Non-standard)
推荐引用方式 GB/T 7714	PESTOV A E,CHERNYSHEV A K,MIKHAILENKO M S,et al. Method for removing material from surface of optical components with wide quasi-parallel ion beam, involves calculating dependence of speed of movement of component on coordinate along long side, and removing material during linear movement of component at variable speed behind slit diaphragm. RU2024134916-A[P]. 2024.

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