Artificial Intelligence-powered quality control system for manufacturing Very Large Scale Integration utilizing e.g. deep learning algorithms, to perform e.g. real-time monitoring, of semiconductor production processes, has quality control mechanism for employing artificial intelligence models
	SINGH V; SARKAR B K; SINDHI K; WADHEKAR A
	2024-12-07
专利权人	SINGH V (SING-Individual) ; SARKAR B K (SARK-Individual) ; SINDHI K (SIND-Individual) ; WADHEKAR A (WADH-Individual)
申请日期	2024-12-07
专利号	IN202421096831-A
成果简介	NOVELTY - The system has a real-time monitoring system for monitoring and optimizing Very Large Scale Integration (VLSI) production quality throughout a manufacturing process. An automated quality control mechanism employs multiple artificial intelligence (AI) models working in conjunction to evaluate, predict, and enhance semiconductor fabrication parameters. The real-time monitoring system continuously monitors wafer quality, lithography precision, etching uniformity, and electrical parameters for implementing predictive analytics to forecast potential defects and automatically establishing appropriate inspection triggers. USE - Artificial Intelligence (AI)-powered quality control system for manufacturing Very Large Scale Integration (VLSI) utilizing deep learning algorithms and multi-sensor integration to perform real-time monitoring and optimization of semiconductor production processes.
IPC 分类号	G05B-019/418 ; G06N-020/00 ; G06N-003/08 ; G06Q-010/06 ; H01L-021/66
国家	印度
专业领域	材料科学
语种	英语
成果类型	专利
文献类型	科技成果
条目标识符	http://119.78.100.226:8889/handle/3KE4DYBR/14193
专题	中国科学院新疆生态与地理研究所
作者单位	1.SINGH V (SING-Individual) 2.SARKAR B K (SARK-Individual) 3.SINDHI K (SIND-Individual) 4.WADHEKAR A (WADH-Individual)
推荐引用方式 GB/T 7714	SINGH V,SARKAR B K,SINDHI K,et al. Artificial Intelligence-powered quality control system for manufacturing Very Large Scale Integration utilizing e.g. deep learning algorithms, to perform e.g. real-time monitoring, of semiconductor production processes, has quality control mechanism for employing artificial intelligence models. IN202421096831-A[P]. 2024.

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